NUSSUPOV, K.Kh. et al. The structure of silicon carbide films synthesized by magnetron sputtering. Recent Contributions to Physics (Rec.Contr.Phys.), [S.l.], v. 67, n. 4, p. 93-99, oct. 2018. ISSN 2663-2276. Available at: <http://bph.kaznu.kz/index.php/zhuzhu/article/view/868>. Date accessed: 23 may 2019.