Nussupov, K., Beisenkhanov, N., Bakranova, D., Symaiyl, K., & Seitov, B. (2018). The structure of silicon carbide films synthesized by magnetron sputtering. Recent Contributions To Physics (Rec.Contr.Phys.), 67(4), 93-99. Retrieved from http://bph.kaznu.kz/index.php/zhuzhu/article/view/868