Nussupov, K.Kh., N.B. Beisenkhanov, D.I. Bakranova, K. Symaiyl, & B.Zh. Seitov. " The structure of silicon carbide films synthesized by magnetron sputtering." Recent Contributions to Physics (Rec.Contr.Phys.) [Online], 67.4 (2018): 93-99. Web. 23 May. 2019