Nussupov, K.Kh., Beisenkhanov, N.B., Bakranova, D.I., Symaiyl, K., AND Seitov, B.Zh.. " The structure of silicon carbide films synthesized by magnetron sputtering" Recent Contributions to Physics (Rec.Contr.Phys.) [Online], Volume 67 Number 4 (30 October 2018)