Мansurov B. Z., Мedyanova B. S., Mansurova, M. E., & Аliyev B. A. (2013). Calculation of technological parameters of deposition process of carbon films on copper buffer layer. Recent Contributions to Physics, 2013(3), 49–57. Retrieved from https://bph.kaznu.kz/index.php/zhuzhu/article/view/99