MYRZABEKOVA, M.; GUSEINOV, N.; ZAITSEV, S.; SHABELNIKOVA, Y.; MURATOV, M.; MURADOVA, S.; TURARBAEVA, T. Study of the electron lithography parameters by AFM. Recent Contributions to Physics, [S. l.], v. 2019, n. 1, p. 81–90, 2019. DOI: 10.26577/rcph-2019-1-1112. Disponível em: https://bph.kaznu.kz/index.php/zhuzhu/article/view/1112. Acesso em: 10 feb. 2026.