AUBAKIROVA, D.; YERDYBAEVA, N.; PICHUGIN, V. Study of the composition of titanium oxide films deposited by reactive magnetron sputtering. Recent Contributions to Physics, [S. l.], v. 2020, n. 3, p. 43–48, 2020. DOI: 10.26577/RCPh.2020.v74.i3.06. Disponível em: https://bph.kaznu.kz/index.php/zhuzhu/article/view/1229. Acesso em: 10 feb. 2026.