MANAKOV, S. А study of morphology and structural properties of a-Si:H and a-SiC:H films. Recent Contributions to Physics, [S. l.], v. 2012, n. 1, p. 3–7, 2018. Disponível em: https://bph.kaznu.kz/index.php/zhuzhu/article/view/670. Acesso em: 9 feb. 2026.