Nussupov, K.Kh., N.B. Beisenkhanov, D.I. Bakranova, K. Symaiyl, and B.Zh. Seitov. 2018. “The Structure of Silicon Carbide Films Synthesized by Magnetron Sputtering”. Recent Contributions to Physics 2018 (4):93-99. https://bph.kaznu.kz/index.php/zhuzhu/article/view/868.