Myrzabekova, M., N. Guseinov, S. Zaitsev, Y. Shabelnikova, M. Muratov, S. Muradova, and T. Turarbaeva. “Study of the Electron Lithography Parameters by AFM”. Recent Contributions to Physics, vol. 2019, no. 1, Mar. 2019, pp. 81-90, doi:10.26577/rcph-2019-1-1112.