Omarov, M.A., O.Yu. Prikhodko, V.V. Klimenov, T. Aitmukan, B.E. Alpysbayeva, and I.S. Nevmerzhitsky. “Getting Thin Films by SIC PECVD”. Recent Contributions to Physics 2012, no. 3 (September 22, 2012): 37–41. Accessed February 8, 2026. https://bph.kaznu.kz/index.php/zhuzhu/article/view/704.