Мansurov BZ, Мedyanova BS, Mansurova ME, Аliyev BA. Calculation of technological parameters of deposition process of carbon films on copper buffer layer. Rec.Contr.Phys. 2013;2013(3):49-57. Accessed July 14, 2026. https://bph.kaznu.kz/index.php/zhuzhu/article/view/99