Nussupov K, Beisenkhanov N, Bakranova D, Symaiyl K, Seitov B. The structure of silicon carbide films synthesized by magnetron sputtering. Rec.Contr.Phys. 2018;67(4):93-99. Accessed September 12, 2026. https://bph.kaznu.kz/index.php/zhuzhu/article/view/868