NUSSUPOV, K.Kh.; BEISENKHANOV, N.B.; BAKRANOVA, D.I.; SYMAIYL, K.; SEITOV, B.Zh. The structure of silicon carbide films synthesized by magnetron sputtering. Recent Contributions to Physics, [S. l.], v. 2018, n. 4, p. 93–99, 2018. Disponível em: https://bph.kaznu.kz/index.php/zhuzhu/article/view/868. Acesso em: 5 jul. 2026.