D. Bakranova, S. Kukushkin, K. Nussupov, A. Osipov, and N. Beisenkhanov, “The structure and phase composition of SiC epitaxial films, synthesized by atoms replacement”, Rec.Contr.Phys., vol. 60, no. 1, pp. 46–51, Mar. 2018, Accessed: Sep. 12, 2026. Available: https://bph.kaznu.kz/index.php/zhuzhu/article/view/512