N. Chuchvaga, N. Kislyakova, K. Aimaganbetov, B. Rakymetov, and N. Tokmoldin, “A study of the effects of wet chemical treatment on the surface of monocrystalline silicon wafers”, Rec.Contr.Phys., vol. 2018, no. 4, pp. 108–114, Oct. 2018, Accessed: Jul. 13, 2026. [Online]. Available: https://bph.kaznu.kz/index.php/zhuzhu/article/view/929