EFFECT OF GAS FLOW RATE AND GAS PRESSURE ON THE CARBON NANOTUBES PREPARED BY MPECVD

El-Shazly M. A Duraia; S. Zh. Tokmoldin; T. Aytmukan; V. Glazman; Z. A. Mansurov; A. Nikitin

Authors

El-Shazly M. A Duraia Al Faraby Kazakh National University, Institute of Physics and Technology
S. Zh. Tokmoldin Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology
T. Aytmukan Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology
V. Glazman Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology , Institute of Physics and Technology
Z. A. Mansurov Al Faraby Kazakh National University
A. Nikitin Al Faraby Kazakh National University

Keywords:

carbon nanotube

Abstract

In this work we present our results about the preparation of carbon nanotube with different morphologies by using microwave plasma enhanced chemical vapor deposition MPECVD. Well aligned, curly and coiled carbon nanotubes have been prepared. We have investigated the effect of the different growth condition parameters such as type of the catalyst, pressure and the hydrogen to methane flow rate ratio on the morphology of the carbon nanotubes. The results were showed that there is a great dependence of the morphology of carbon nanotubes on these parameters. There is a linear relation between the growth rate and the methane to hydrogen ratio. The effect of the gas pressure on the CNTs was also studied. Our samples were investigated by scanning electron microscope, Raman spectroscopy.