Omarov M, Prikhodko O, Klimenov V, Aitmukan T, Alpysbayeva B, Nevmerzhitsky I. Getting thin films by SIC PECVD. Rec.Contr.Phys. 2012;2012(3):37-41. Accessed July 13, 2026. https://bph.kaznu.kz/index.php/zhuzhu/article/view/704