N. B. Beisenkhanov et al., “Ion synthesis and properties of the films of silicon carbide and carbon”, Rec.Contr.Phys., vol. 46, no. 3, pp. 27–36, Sep. 2013, Accessed: Sep. 10, 2026. Available: https://bph.kaznu.kz/index.php/zhuzhu/article/view/96