M. Buranbaev, Z. Entibekov, O. Kaipoldayev, and A. Derbissalin, “Сarbon film obtained by ion-plasma sputtering”, Rec.Contr.Phys., vol. 2012, no. 1, pp. 12–15, Mar. 2012, Accessed: Jul. 05, 2026. [Online]. Available: https://bph.kaznu.kz/index.php/zhuzhu/article/view/672