Porous Material Interactions with RF plasma
DOI:
https://doi.org/10.26577/RCPh.2020.v74.i3.05Keywords:
low pressure discharge, surface modificationAbstract
The impact of plasma on the material is carried out as a result of a number of complexes, interrelated processes of energy, mass and charge exchange of plasma particles with the substrate. The result of such interactions are desorption of atoms and molecules from substrate, sputtering and evaporation of the particulate material, structure and phase state changes. During the plasma treatment, materials interact with active and inactive plasma particles, having high kinetic or potential energy. There are physical and chemical interaction of particles. Physical interaction of the particles is mostly by kinetic energy, which can exceed the heat by several orders of magnitude. The charged particles also have a high potential energy - the energy of recombination. In this regard, the particles upon collision with a physically solid material can spray the solid material.
The paper presents the study of low-temperature surface modification interactions with a porous material. These are low energy sources of induction and capacitive radio-frequency discharges at a pressure of 0.1 - 2 torr, are used. The objects of research are the useful creation of modified carbon sorbents.
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