Porous Material Interactions with RF plasma

  • G. Paskalov Plasma Microsystems LLC, USA, Los Angeles; ELXUS, LLC, Oak Hill, VA, USA
  • R. Jarvis ELXUS, LLC, Oak Hill, VA, USA
  • L. Adjarova Energy Agency of Plovdiv, Bulgaria, Plovdiv
  • E. Benova Sofia University St. Kliment Ohridski, Bulgaria, Sofia http://orcid.org/0000-0001-6438-0522
  • B. Harmison ELXUS, LLC, Oak Hill, VA, USA


The impact of plasma on the material is carried out as a result of a number of complexes, interrelated processes of energy, mass and charge exchange of plasma particles with the substrate. The result of such interactions are desorption of atoms and molecules from substrate, sputtering and evaporation of the particulate material, structure and phase state changes. During the plasma treatment, materials interact with active and inactive plasma particles, having high kinetic or potential energy. There are physical and chemical interaction of particles. Physical interaction of the particles is mostly by kinetic energy, which can exceed the heat by several orders of magnitude. The charged particles also have a high potential energy - the energy of recombination. In this regard, the particles upon collision with a physically solid material can spray the solid material.
The paper presents the study of low-temperature surface modification interactions with a porous material. These are low energy sources of induction and capacitive radio-frequency discharges at a pressure of 0.1 - 2 torr, are used. The objects of research are the useful creation of modified carbon sorbents.


1. I. Gafarov, G. Paskalov, M. Ibragimov, and L.Musharatskiy, Universal Sorbent Produced from Agricultural Waste for Purification, International Symposium “Environmental and Engineering Aspects for Living”, 7-28 November 2014, Hannover, p. 57-58 (2014).

2. I. Shaihiev, O. Galblaub, S. Stepanova, and G. Timirbaeva, Process Safety and Environmental Protection, 101, 88–92 (2016).

3. I. Gafarov, I. Abdullin, R. Ibragimov, V. Paroshin, and O.V. Zaitseva, Modification Sorbents of High-frequency Capacitive Plasma of Low Pressure, 5th Central European Symposium on Plasma Chemistry, Balatonalmadi, Hungary, 25-29 August 2013, p.109 (2013).

4. I. Gafarov, G. Paskalov, and I. Abdullin, Surface Activation of Sorbents by Using RF Plasma at Reduced Pressure, I, 9th International Conference оn Plasma Assisted Technologies, ICPAT-9, 23-26 June, 2014, St.-Petersburg, Russia, pp.54-57 (2014).
How to Cite
PASKALOV, G. et al. Porous Material Interactions with RF plasma. Recent Contributions to Physics (Rec.Contr.Phys.), [S.l.], v. 74, n. 3, p. 38-42, sep. 2020. ISSN 2663-2276. Available at: <https://bph.kaznu.kz/index.php/zhuzhu/article/view/1283>. Date accessed: 24 nov. 2020. doi: https://doi.org/10.26577/RCPh.2020.v74.i3.05.
Condensed Matter Physics and Materials Science Problems. NanoScience

Most read articles by the same author(s)

Obs.: This plugin requires at least one statistics/report plugin to be enabled. If your statistics plugins provide more than one metric then please also select a main metric on the admin's site settings page and/or on the journal manager's settings pages.