Микроструктура, элементный и фазовый состав и физико-механические свойства нанокомпозитных (Ti-Zr-Hf-V-Nb-Ta)N покрытий до и после имплантирования высокими дозами ионов азота
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Ключевые слова:
имплантация, микроструктура, нанотвердость, осаждение, микроанализАннотация
Изучены структура и свойства наноструктурных многокомпонентных покрытий (TiHfZrNbVTa)N имплантированных очень высокими 1018 см-2 дозами ионов N+. В результате имплантации ионов в поверхностном слое наноструктурного покрытия формируется многослоевая структура состоящая из аморфного, нанокристаллического (диспергированного) и наноструктурного с исходными размерами нанозерен. В глубине покрытия формируются 2 фазы: ГЦК и ГПУ с небольшим объёмным содержанием. Концентрация азота вблизи поверхности достигает 90 at.% и затем уменьшается с глубиной. В исходном состоянии после осаждения нанотвердость покрытия, в зависимости от условий осаждения имеет значения от 27 до 34 GPa. В результате имплантации, величина твердости уменьшается примерно на глубину проективного пробега ионов до 12 GPa, а дальше увеличивается с глубиной до 23 GPa. Были использованы методы анализа: растровая электронная микроскопия (SEM) с микроанализом (EDS), дифракция рентгеновских лучей (XRD), наноидентирование, тесты на износ.
Библиографические ссылки
1 Pogrebnjak A.D., Tolopa A.M. A revive of high-dose implantion and production of ion mixed structures // Nuclear Instruments and Methods. – 1990. – Vol. B52. – P. 24-43.
2 Komarov F.F. Ion Beam Modification of Metals, Gordon and Breach Science Publishers, Philadelphia. – 1992.
3 Lavrentiev V.I., Pogrebnjak A.D. High-dose ion implantation into metals // Surface and Coatings Technology. – 1998. – Vol. 99. – P. 24-32.
4 Ivasishin O.M., Pogrebnjak A.D., Bratushka S.N. Nanostructured Layers and Coatings Formed by Ion-Plasma Fluxes in Titanium Alloys and steels. – Kiev: Academperiodika, 2011. – P. 270.
5 Pogrebnjak A.D., Bratushka S.N., Beresnev V.M., Levintant-Zayonts N. Shape memory effect and superelasticity of titanium nickelide alloys implanted with high ion doses // Russian Chemical Reviews. – 2013. – Vol. 82, №12. – P. 1135–1159.
6 Senkov O.N., Senkova S.V., Dimiduk D.M., Woodward C., Miracle D.B. Oxidation behavior of a refractory NbCrMo0.5Ta0.5TiZr alloy // Journal of Materials Science – 2012. – Vol. 47. – P. 6522–6534.
7 Salishchev G., Tikhonovsky M.A., Shaysultanov D.G., Stepanov N.D., Kuznetsov A.V., Kolodiy I.V., Tortika A.S., Senkov O.N. Effect of Mn and V on structure and mechanical properties of high-entropy alloys based on CoCrFeNi system // Journal of Alloys and Compounds. – 2014. – Vol. 591. – P. 11-24.
8 Braic V., Alina Vladescu, Balaceanu M., Luculescu C.R., Braic M. Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings // Surface and Coatings Technology. – 2012. – Vol. 211. – P. 117–121.
9 Tsai D.C., Huang Y.L., Lin S.R., Liang S.C., Shieu F.S. Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering // Applied Surface Science. – 2010. –Vol. 257. – P. 1361–1367.
10 Pogrebnjak A.D., Bagdasaryan A.A., Yakushchenko I.V., Beresnev V. M. The structure and properties of high-entropy alloys and nitride coatings based on them // Russian Chemical Reviews. – 2014. Vol.83, № 11. – P. 1027-1061.
11 Pogrebnjak A.D., Yakushchenko I.V., Bagdasaryan A.A., Bondar O.V., Krause-Rehberg R., Abadias G., Chartier P., Oyoshi K., Takeda Y., Beresnev V.M., Sobol O.V. Microstructure, physical and chemical properties of nanostructured (Ti-Hf-Zr-V-Nb)N coatings under different deposition conditions // Materials Chemistry and Physic. – 2014. – Vol. 147, № 3. – P. 1079-1091.
12 Pogrebnjak A.D., Yakushchenko I.V., Bondar O.V., Sobol O.V., Beresnev V.M., Oyoshi K., Amekura H., Takeda Y. The microstructure of a multielement nanostructured (TiZrHfVNbTa)N coating and its resistance to irradiation with Au– ions // Technical Physics Letters. – 2015. – Vol. 41, № 11. – P. 1054-1057.
13 Pogrebnjak A.D., Yakushenko I. V., Bondar O.V., Sobol O.V., Beresnev V.M., Oyoshi K., Amekura H., Takeda Y. Influence of Implantation of Au– Ions on the Microstructure and Mechanical Properties of the Nanostructured Multielement (TiZrHf VNbTa)N Coating // Physics of the Solid State. – 2015. – Vol. 57, № 8. – P. 1559-1564.
14 Feng X., Tang G., Ma X., Sun M., Wang L. Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based on ion implantation // Nuclear Instruments and Methods in Physics Research Section B. – 2013. – Vol. 301. – P. 29.
15 Uglov V.V., Abadias G., Rovbut A.Y., Zlotski S.V., Saladukhin I.A., Skuratov V.A., Petrovic S. Thermal stability of nanocrystalline (Ti,Zr)0.54Al0.46N films implanted by He+ ions // Nuclear Instruments and Methods in Physics Research Section B. – 2015. – Vol. 354. – P. 269- 273.
16 Комаров Ф.Ф., Погребняк А.Д., Константинов С.В. Радиационная стойкость высокоэнтропийных наноструктурированных покрытий (Ti, Hf, Zr, V, Nb)N // Письма в ЖТФ. – 2015. – Т. 85, № 10. – С. 105-110.
17 Plotnikov S.V., Pogrebnyak A.D., Tleukenov Y.O., Erdybaeva N.K. Functional properties of multilayer vacuum-arc TiN/ZrN coatings // Materials Science and Engineering.-2016. – V. 110.
18 Tleukenov Y.O., Plotnikov S.V., Erdybaeva N.K., Pogrebnyak A.D. Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering // Materials Science and Engineering. – 2016. – Vol. 110.
References
1 A.D. Pogrebnjak, A.M. Tolopa, Nuclear Instruments and Methods, B52, 24-43, (1990).
2 F.F. Komarov, Gordon and Breach Science Publishers, Philadelphia, 1992
3 V.I. Lavrentiev, A.D. Pogrebnjak, Surface and Coatings Technology, 99, 24-32, (1998).
4 O.M. Ivasishin, A.D. Pogrebnjak, S.N. Bratushka, Nanostructured Layers and Coatings Formed by Ion-Plasma Fluxes in Titanium Alloys and steels. Kiev, 2011
5 A.D. Pogrebnjak, S.N. Bratushka, V.M. Beresnev, N. Levintant-Zayonts. Russian Chemical Reviews 82, 1135–1159, (2013).
6 O.N. Senkov, S.V. Senkova, Dimiduk D.M., Woodward C., Miracle D.B., Journal of Materials Science 47, 6522–6534, (2012).
7 G. Salishchev, M.A. Tikhonovsky, D.G. Shaysultanov, N.D. Stepanov, A.V. Kuznetsov, I.V. Kolodiy, A.S. Tortika, O.N. Senkov, Journal of Alloys and Compounds, 591, 11-24, (2014).
8 V. Braic, A. Vladescu, M. Balaceanu, C.R. Luculescu, M. Braic, Surface and Coatings Technology, 211, 117–121, (2012).
9 D.C.Tsai, Y.L. Huang, S.R. Lin, S.Cю Liang, F.S. Shieu, Applied Surface Science 257, 1361–1367, (2010).
10 A.D. Pogrebnjak, A.A. Bagdasaryan, I.V. Yakushchenko, V.M. Beresnev, Russian Chemical Reviews, 83, 1027-1061, (2014).
11 A.D. Pogrebnjak, I.V. Yakushchenko, A.A. Bagdasaryan, O.V. Bondar, R. Krause-Rehberg, G. Abadias, P. Chartier, K. Oyoshi, Y. Takeda, V.M. Beresnev, O.V. Sobol, Materials Chemistry and Physics 147, 1079-1091, (2014).
12 A.D. Pogrebnjak, I.V. Yakushchenko, O.V. Bondar, O.V. Sobol, V.M. Beresnev, K. Oyoshi, H. Amekura, Y. Takeda, Technical Physics Letters, 41, 1054-1057, (2015).
13 A.D. Pogrebnjak, I.V. Yakushenko, O.V. Bondar, O.V. Sobol, V.M. Beresnev, K. Oyoshi, H.Amekura, Y. Takeda, Physics of the Solid State, 57, 1559-1564. (2015).
14 X. Feng, G. Tang, X. Ma, M. Sun, L. Wang, Research Section B, 301, 29, (2013)
15 V.V. Uglov, G. Abadias, A.Y. Rovbut, S.V. Zlotski, I.A. Saladukhin, V.A. Skuratov, S. Petrovic, Nuclear Instruments and Methods in Physics Research Section B, 354, 269- 273, (2015).
16 F.F. Komarov, A.D. Pogrebnjak, S.V. Konstantinov, Pisma v ZhETF, 85:105-110, (2015). (in russ).
17 S.V. Plotnikov, A.D. Pogrebnyak, Y.O. Tleukenov, N.K. Erdybaeva, Materials Science and Engineering, 110, (2016).
18 Y.O. Tleukenov, S.V. Plotnikov, N.K. Erdybaeva, A.D. Pogrebnyak, Materials Science and Engineering, 110, (2016).
2 Komarov F.F. Ion Beam Modification of Metals, Gordon and Breach Science Publishers, Philadelphia. – 1992.
3 Lavrentiev V.I., Pogrebnjak A.D. High-dose ion implantation into metals // Surface and Coatings Technology. – 1998. – Vol. 99. – P. 24-32.
4 Ivasishin O.M., Pogrebnjak A.D., Bratushka S.N. Nanostructured Layers and Coatings Formed by Ion-Plasma Fluxes in Titanium Alloys and steels. – Kiev: Academperiodika, 2011. – P. 270.
5 Pogrebnjak A.D., Bratushka S.N., Beresnev V.M., Levintant-Zayonts N. Shape memory effect and superelasticity of titanium nickelide alloys implanted with high ion doses // Russian Chemical Reviews. – 2013. – Vol. 82, №12. – P. 1135–1159.
6 Senkov O.N., Senkova S.V., Dimiduk D.M., Woodward C., Miracle D.B. Oxidation behavior of a refractory NbCrMo0.5Ta0.5TiZr alloy // Journal of Materials Science – 2012. – Vol. 47. – P. 6522–6534.
7 Salishchev G., Tikhonovsky M.A., Shaysultanov D.G., Stepanov N.D., Kuznetsov A.V., Kolodiy I.V., Tortika A.S., Senkov O.N. Effect of Mn and V on structure and mechanical properties of high-entropy alloys based on CoCrFeNi system // Journal of Alloys and Compounds. – 2014. – Vol. 591. – P. 11-24.
8 Braic V., Alina Vladescu, Balaceanu M., Luculescu C.R., Braic M. Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings // Surface and Coatings Technology. – 2012. – Vol. 211. – P. 117–121.
9 Tsai D.C., Huang Y.L., Lin S.R., Liang S.C., Shieu F.S. Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering // Applied Surface Science. – 2010. –Vol. 257. – P. 1361–1367.
10 Pogrebnjak A.D., Bagdasaryan A.A., Yakushchenko I.V., Beresnev V. M. The structure and properties of high-entropy alloys and nitride coatings based on them // Russian Chemical Reviews. – 2014. Vol.83, № 11. – P. 1027-1061.
11 Pogrebnjak A.D., Yakushchenko I.V., Bagdasaryan A.A., Bondar O.V., Krause-Rehberg R., Abadias G., Chartier P., Oyoshi K., Takeda Y., Beresnev V.M., Sobol O.V. Microstructure, physical and chemical properties of nanostructured (Ti-Hf-Zr-V-Nb)N coatings under different deposition conditions // Materials Chemistry and Physic. – 2014. – Vol. 147, № 3. – P. 1079-1091.
12 Pogrebnjak A.D., Yakushchenko I.V., Bondar O.V., Sobol O.V., Beresnev V.M., Oyoshi K., Amekura H., Takeda Y. The microstructure of a multielement nanostructured (TiZrHfVNbTa)N coating and its resistance to irradiation with Au– ions // Technical Physics Letters. – 2015. – Vol. 41, № 11. – P. 1054-1057.
13 Pogrebnjak A.D., Yakushenko I. V., Bondar O.V., Sobol O.V., Beresnev V.M., Oyoshi K., Amekura H., Takeda Y. Influence of Implantation of Au– Ions on the Microstructure and Mechanical Properties of the Nanostructured Multielement (TiZrHf VNbTa)N Coating // Physics of the Solid State. – 2015. – Vol. 57, № 8. – P. 1559-1564.
14 Feng X., Tang G., Ma X., Sun M., Wang L. Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based on ion implantation // Nuclear Instruments and Methods in Physics Research Section B. – 2013. – Vol. 301. – P. 29.
15 Uglov V.V., Abadias G., Rovbut A.Y., Zlotski S.V., Saladukhin I.A., Skuratov V.A., Petrovic S. Thermal stability of nanocrystalline (Ti,Zr)0.54Al0.46N films implanted by He+ ions // Nuclear Instruments and Methods in Physics Research Section B. – 2015. – Vol. 354. – P. 269- 273.
16 Комаров Ф.Ф., Погребняк А.Д., Константинов С.В. Радиационная стойкость высокоэнтропийных наноструктурированных покрытий (Ti, Hf, Zr, V, Nb)N // Письма в ЖТФ. – 2015. – Т. 85, № 10. – С. 105-110.
17 Plotnikov S.V., Pogrebnyak A.D., Tleukenov Y.O., Erdybaeva N.K. Functional properties of multilayer vacuum-arc TiN/ZrN coatings // Materials Science and Engineering.-2016. – V. 110.
18 Tleukenov Y.O., Plotnikov S.V., Erdybaeva N.K., Pogrebnyak A.D. Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering // Materials Science and Engineering. – 2016. – Vol. 110.
References
1 A.D. Pogrebnjak, A.M. Tolopa, Nuclear Instruments and Methods, B52, 24-43, (1990).
2 F.F. Komarov, Gordon and Breach Science Publishers, Philadelphia, 1992
3 V.I. Lavrentiev, A.D. Pogrebnjak, Surface and Coatings Technology, 99, 24-32, (1998).
4 O.M. Ivasishin, A.D. Pogrebnjak, S.N. Bratushka, Nanostructured Layers and Coatings Formed by Ion-Plasma Fluxes in Titanium Alloys and steels. Kiev, 2011
5 A.D. Pogrebnjak, S.N. Bratushka, V.M. Beresnev, N. Levintant-Zayonts. Russian Chemical Reviews 82, 1135–1159, (2013).
6 O.N. Senkov, S.V. Senkova, Dimiduk D.M., Woodward C., Miracle D.B., Journal of Materials Science 47, 6522–6534, (2012).
7 G. Salishchev, M.A. Tikhonovsky, D.G. Shaysultanov, N.D. Stepanov, A.V. Kuznetsov, I.V. Kolodiy, A.S. Tortika, O.N. Senkov, Journal of Alloys and Compounds, 591, 11-24, (2014).
8 V. Braic, A. Vladescu, M. Balaceanu, C.R. Luculescu, M. Braic, Surface and Coatings Technology, 211, 117–121, (2012).
9 D.C.Tsai, Y.L. Huang, S.R. Lin, S.Cю Liang, F.S. Shieu, Applied Surface Science 257, 1361–1367, (2010).
10 A.D. Pogrebnjak, A.A. Bagdasaryan, I.V. Yakushchenko, V.M. Beresnev, Russian Chemical Reviews, 83, 1027-1061, (2014).
11 A.D. Pogrebnjak, I.V. Yakushchenko, A.A. Bagdasaryan, O.V. Bondar, R. Krause-Rehberg, G. Abadias, P. Chartier, K. Oyoshi, Y. Takeda, V.M. Beresnev, O.V. Sobol, Materials Chemistry and Physics 147, 1079-1091, (2014).
12 A.D. Pogrebnjak, I.V. Yakushchenko, O.V. Bondar, O.V. Sobol, V.M. Beresnev, K. Oyoshi, H. Amekura, Y. Takeda, Technical Physics Letters, 41, 1054-1057, (2015).
13 A.D. Pogrebnjak, I.V. Yakushenko, O.V. Bondar, O.V. Sobol, V.M. Beresnev, K. Oyoshi, H.Amekura, Y. Takeda, Physics of the Solid State, 57, 1559-1564. (2015).
14 X. Feng, G. Tang, X. Ma, M. Sun, L. Wang, Research Section B, 301, 29, (2013)
15 V.V. Uglov, G. Abadias, A.Y. Rovbut, S.V. Zlotski, I.A. Saladukhin, V.A. Skuratov, S. Petrovic, Nuclear Instruments and Methods in Physics Research Section B, 354, 269- 273, (2015).
16 F.F. Komarov, A.D. Pogrebnjak, S.V. Konstantinov, Pisma v ZhETF, 85:105-110, (2015). (in russ).
17 S.V. Plotnikov, A.D. Pogrebnyak, Y.O. Tleukenov, N.K. Erdybaeva, Materials Science and Engineering, 110, (2016).
18 Y.O. Tleukenov, S.V. Plotnikov, N.K. Erdybaeva, A.D. Pogrebnyak, Materials Science and Engineering, 110, (2016).
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Как цитировать
Tleukenov, Y., Plotnikov, S., Pogrebnjak, A., Erdybaeva, N., & Manapbayeva, A. (2018). Микроструктура, элементный и фазовый состав и физико-механические свойства нанокомпозитных (Ti-Zr-Hf-V-Nb-Ta)N покрытий до и после имплантирования высокими дозами ионов азота. Вестник. Серия Физическая (ВКФ), 60(1), 62–71. извлечено от https://bph.kaznu.kz/index.php/zhuzhu/article/view/514
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Физика конденсированного состояния и проблемы материаловедения. Нанонаука
