Microstructure, elemental and phase composition and physical-mechanical properties of nanocomposite (Ti-Zr-Hf-V-Nb-Ta)N coatings before and after implantation of high doses of nitrogen ions

Abstract

The structure and properties of multicomponent nanostructured coatings (TiHfZrNbVTa) N implanted with very high 1018 cm^-2 doses of ions N⁺ were investigated. Multilayered structure consisting of an amorphous nanocrystalline (dispersed) and nanostructured with original size of the nanograins formed as a result of the implantation of ions in the surface layer of the nanostructured coating. 2 phases formed шn the depth of the coating: FCC and HCP with a small volume fraction. Nitrogen concentration near the surface reachуs up to 90 at.% and then decreases with depth. In the initial state after deposition the nanohardness of the coating, depending on the deposition conditions, ranges from 27 to 39 GPa. As a result of the implantation, the value of the hardness decreases approximately to the depth of the ions projected range up to 12 GPa, and further increases with the depth up to 23 GPa. It were used such analysis techniques as: scanning electron microscopy (SEM) with microanalysis (EDS), X-ray diffraction (XRD), nanoindentation, tests for wear.