Development of a nanoscale measurement system

Authors

  • N.E. Akhanova National nanotechnology laboratory of open type, Al-Farabi Kazakh National University, Kazakhstan, Almaty
  • S.A. Darznek JSC “Research Center for the Study of Surface and Vacuum Properties”, Russia, Moscow
  • J.E. Zhelkobaev JSC “Research Center for the Study of Surface and Vacuum Properties”, Russia, Moscow
  • M.T. Gabdullin National nanotechnology laboratory of open type, Al-Farabi Kazakh National University, JSC “Kazakh-British Technical University”, Kazakhstan, Almaty
  • Y. Yerlanuly National nanotechnology laboratory of open type, Al-Farabi Kazakh National University, JSC “Kazakh-British Technical University”, Kazakhstan, Almaty
  • D.G. Batryshev National nanotechnology laboratory of open type, Al-Farabi Kazakh National University, JSC “Kazakh-British Technical University”, Kazakhstan, Almaty

Keywords:

laser, linear displacement, nanoscale, interferometry, phase shift angle (PSA)

Abstract

The work is devoted to measuring linear displacements in the nanoscale, analyzing the features of this kind of work, ensuring the unity of measurements and stability of the measured physical quantity, the reliability of the results and their linkage to the State Standard. The criteria that must be met by methods and means of precision measurements in the nanoscale, as well as methods and means for acquiring and presenting the information obtained. The analysis of the main sources of errors is made and the results of these studies are presented in [1]. The features of the construction of measuring systems, as well as the problems of calibration of phase measurements in optics, are considered. The problems of an applied nature are considered: the measurement of real displacement of objects in the nanoscale, their speed and acceleration, as well as the introduction of the developed methods into the field of practical application. The results obtained in solving experimental and applied problems using methods and means of numerical heterodyning are presented. The developed "interferometer-phase meter" measuring system allows online investigating of complex piezoceramic structures used in various devices as actuators.

References

1 S.A. Darznek, ZH. Zhelkobayev, V.V. Kalendin, Yu.A. Novikov, Lazernyy interferometricheskiy izmeritel’ anoperemeshcheniy, Trudy IOFAN im. A.M. Prokhorova, RAN, 62, 15-35 (2006). (in Russ).

2 M. Born, E. Vol’f Osnovy optiki (Moskva, Nauka, 1970), 856s. (in Russ).

3 A.I. Kartashev, I.SH. Etsin, UFN, 106 (4), 687–721 (1972). (in Russ).

4 O.P. Galakhova, Ye.D. Koltik, S.A. Kravchenko Osnovy fazometrii (Moskva, Energiya, 1976), 250s. (in Russ).

5 Ye.R. Mustel’, V.N. Parygin Metody modulyatsii i skanirovaniya sveta (Moskva, Nauka, 1970), 295s. (in Russ).

6 U. Mezon Fizicheskaya akustika. Tom VII (Moskva, Mir, 1974), 432s. (in Russ).

7 A. Korpel Akustooptika (Moskva, Mir, 1988), 240s. (in Russ).

8 L.N. Magdich, V.YA. Molchanov Akustoopticheskiye yavleniya i ikh primeneniye (Moskva. Sovetskoye radio, 1978), 112s. (in Russ).

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Published

2018-09-28

Issue

Vol. 66 No. 3 (2018): Recent Contributions to Physics

Section

Condensed Matter Physics and Materials Science Problems. NanoScience

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