A STUDY OF OPTICAL AND STRUCTURAL PROPERTIES OF a-Si:H AND a-SiC:H FILMS
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Abstract
Optical and structural properties of amorphous hydrogenated silicon and amorphous silicon carbide films were investigated. The procedure of determination of optical characteristics of films was demonstrated and its effectiveness for homogeneous films was proofed. It was shown, that carbon introduction in an amorphous network resulted not only in increase of optical bandgap, but also in increment of structural deflections in the field of short-range and intermediate-range orders.
References
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2. N.M.Liao, W.Li, Y.J.Kuang, Y.D.Jiang, S.B.Li, Z.M.Wu, K.C.Qi. Raman and ellipsometric characterization of hydrogenated amorphous silicon thin films // Science China Series E: Technological Sciences, Vol. 52, pp. 339-343 (2009).
3. K.S.Lim, O.Shevaleevskiy. Nanocrystalline silicon carbide films for solar photovoltaics: The role of dangling-bond defects // Pure Appl.Chem., Vol.80, pp. 2141-2150, (2008).
4. R. Swanepoеl. Determination of optical constants of amorphous silicon // J. Phys. E.: Sci. Instrum. Vol. 16, рp.1214-122, (1983).
5. Физика аморфного гидрогенизированного кремния. - Выпуск I, II. Под ред. Дж. Джоунополуса и Дж. Люковский. Перевод с англ. М., Мир, 1987.
6. B.S.Richard, A.B.Sproul, A.Lambertz. Optical characterization of sputtered silicon thin films on glass // Journal of Thin Solid Films, 460, pp. 247-255, (2004).
7. C.М.Манаков. Скорость роста и однородность пленок аморфного кремния, выращенных методом магнетронного реактивного распыления // Вестник КазНУ, серия физичес., 2005. - С.59-63.
8. M.Marinov, N.Zotov. Model investigation of the Raman spectra of amorphous silicon // Phys.Rev.B., Vol.55, pp.2938-2944, (1997).
9. W.S.Wei, G.Y.Xu, J.L.Wang, et al. Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films // Vaccuum, Vol.21, pp. 656-662, (2007).
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Published
2011-06-24
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Condensed Matter Physics and Materials Science Problems. NanoScience
