Influence vacuum annealing on the optical characteristics of nanosize carbon coatings in the infrared range
Keywords:
nanosize carbon coating, pulsed vacuum-arc deposition, annealing, transmission coefficientAbstract
Recently in the field of optical instrument making demand for coverings on the basis of carbon increases. These coverings possess the high hardness, chemical firmness and high coefficient of a transmission. In the research are given results of influence of annealing in vacuum at a temperature of 200 - 600 ºС on transmission coefficient in IR range wave-length of carbon and carbon nitrogen-containing coverings. Coatings of carbon (C) and coatings doped with nitrogen (C: N) thickness of 100 nm are obtained on substrates polished monocrystalline silicon ESP-4.5 with
orientation (100) with dimensions of 30 × 30 mm with a pulsed carbon plasma source. Optical characteristics of the received coverings investigated IR spectroscopy method. Investigated comparison of the transmission coefficient of samples with a pure carbon covering and carbon covering doped by nitrogen before and after annealing. It is established that for pure and doped samples the significant changes occur in the transmittance coefficient after heat treatment in vacuum at 600 0C. The greatest dependence of transmission coefficient on temperature of annealing are observed for samples with a carbon nitrogen-containing covering in the range of 17 - 25 microns. Nitrogen addition in a carbon
nanodimensional covering and the subsequent annealing at a certain temperature can be used for management of spectral characteristics of carbon coverings.
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