Omarov, M.A., Физико-технический институт, г. Алматы, Казахстан, Kazakhstan
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Recent Contributions to Physics (Rec.Contr.Phys.) Vol. 42 No. 3 (2012): KazNU Bulletin. Physics series - Condensed Matter Physics and Materials Science Problems. NanoScience
Getting thin films by SIC PECVD
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