Influence of gas mixtures on complex plasmas parameters in rf and dc discharges
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Keywords:
radio-frequency capacitive discharge, mixture of gases, combined RF DC dischargeAbstract
In this paper the influence of the gas mixture on plasma parameters in DC and combined RF+DC discharge is studied. Тhe properties of complex plasma in the radio-frequency discharge of the gas mixture, with additional constant electrostatic field were experimentally studied. It is shown that the addition of a heavy gas to a light one, and the additional impact of a constant field on the RF discharge leads to changes in the spatial characteristics of the buffer plasma and, hence, the location of the dust structure.
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2. Thomas H.M. and G.E. Morfill, Nature (London) 379, 806 (1996).
3. Фортов В.Е., Храпак А.Г., Храпак С.А., В.И. Молотков, О.Ф. Петров // УФН, 2004. – T.174. – P. 495. UspehiFiz.Nauk (Progress in Physics Sciences), v. – [in Russian]
4. Шибкова Л.В., Шибков В.М.. Разряд в смесях инертных газов. - М.: Физматлит, 2005.
5. Flamm D.L., Donneley V.M., Ibbotson D.E. // J. Vac. Sci. Technol. 1983. - Vol. B1. - N1. - P. 23-30.
6. Coburn J.M., Kay E. // IBM J. Res. Develop. 1979. - Vol. 23. - N 1. - P. 33-41.
7. Berndt J., Douai D., Winter J. // Phys. Plasmas. – 2002. - Vol.9. – P.1046.
8. Berndt J., Makasheva K., Schluter H., Shivarova A. // J. Appl. Phys. - 2002. - Vol. 92. - N 11. - P. 6461-6470.
9. Wen-Yao Liu, Yong-Quan Du, Yong-Xin Liu, Jia Liu, etc.// Phys. Plasmas 20, 113501 (2002).
10. M.A. Lieberman and A.J. Lichtenberg//Principles of Plasma Discharges and Materials Processing. - Wiley-Blackwell, 2005.
11. Майоров // Кр. сообщ. по физ. ФИАН, 2007. - №7. – C.44.
12. Ramazanov T.S., Dzhumagulova K.N., Jumabekov A.N., and Dosbolayev M.K. // Phys. Plasmas. – 2008. – Vol. 15. – P.053704.
13. Ramazanov T. S., Daniyarov T.T., Maiorov S.A., Kodanova S.K., Dosbolayev M.K. and Zhankarashev E.B. // Contrib. Plasma Phys. -2011. - Vol. 51, issue 6. - P.505-508.
14. Popova D. V., Maiorov S. A., Antipov S. N., Petrov O. F., and Fortov V. E. In Book of Abstracts of the Fifth International Conference on Physics of Dusty Plasmas. Ponta Delgada, Azores, May 18–23, 2008 – P. 139.
15. Lisovskiy V., J.-P. Booth, N. Kharchenko, V. Yegorenkov, 2007 Proc. 28th ICPIG, Prague, Czech Republic. p. 2067.
16. Лисовский В.А., Харченко Н.Д. // Вестник Харьковского университета, серия физика «Ядра, частиц, поля». – 2010. - № 899, вып. 2.
17. Shinya Iwashita, Edmund Schungel, Julian Schulze, Peter Hartmann, ZoltanDonko, Giichiro Uchida, Kazunori Koga, MasaharuShiratani and UweCzarnetzki // J. Phys. D: Appl. Phys. – 2013. – Vol.46. – P.245202 (12pp).
18. Dosbolayev M.K., Utegenov A.U., Ramazanov T.S., Daniyarov T.T. // Contrib. Plasma. Phys. – 2013. – Vol.53. - No. 4-5. - P. 426-431.
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Dosbolayev, M., Utegenov, A., & Ramazanov, T. (2014). Influence of gas mixtures on complex plasmas parameters in rf and dc discharges. Recent Contributions to Physics (Rec.Contr.Phys.), 51(4), 16–23. Retrieved from https://bph.kaznu.kz/index.php/zhuzhu/article/view/843
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Plasma Physics
