PREPARATION AND OPTICAL PROPERTIES OF NANOSTRUCTURED ANTIREFLECTIVE LAYERS FOR Si-PHOTODEVICES
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Keywords:
the anodization processAbstract
The layers of nanoporous silicon are formed by using the method of electrochemical anodization on the surface of silicon polished wafers with the surface highly-doped n+ layer. The layers were fabricated at the constant direct current using the anodization process and at the current, which varies according to the certain time law. The electrochemical anodization was performed in the standard cell and by using capillary method, as well. The dependence of the spectral reflection index on various of layer preparation (current density, etching time and the time dependence of the current density) is investigated.References
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3. Fauchet P. Porous Polycrystalline Silicon Thin Film Solar Cells // Final Report of National Renewable Energy Laboratory. – 2003. – NREL/SR-520-34824. – 20 p.
4. Якобсон Р. Неоднородные и совместно напыленные однородные пленки для оптических применений. – Физика тонких пленок. – М.: «Мир», 1978, Т. 8. – с. 61 – 105.
5. Сивухин Д.В. Общий курс физики. Т. IV. Оптика. – М.: Физматлит, 2005. – с. 444.
6. Aspnes D.E., Theeten J.B., Hottier F. Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry // Phys. Rev. B. – 1979. – Vol. 20, No. 8. – pp. 3292-3302.
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8. Bruggeman D.A.G. Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen // Annalen der Physic. – 1935. – Vol. 416, Iss. 7. – pp. 636-664.
9. Theisz W. Optical properties of porous silicon // Surface Science Reports. – 1997. – Vol. 29, No 3-4. – pp. 91-192.
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483-486.
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Condensed Matter Physics and Materials Science Problems. NanoScience
